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The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS

机译：OTS自组装单层对基于多晶硅的MEMS耐磨性能的影响

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Baker, MA; Li, J;
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年度 2006
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正文语种 {"code":"en","name":"English","id":9}
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1. The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS [J] . Baker MA, Li J Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films . 2006,第4期

机译：OTS自组装单层对基于多晶硅的MEMS耐磨性能的影响
2. Friction and fracture properties of polysilicon coated with self-assembled monolayers [J] . J. N. Ding, P. L. Wong, J. C. Yang Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear . 2006,第1a2期

机译：自组装单层涂层多晶硅的摩擦和断裂性能
3. Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS [J] . W. Robert Ashurst, Christina Yau, Carlo Carraro, Sensors and Actuators, A. Physical . 2001,第3期

机译：烯烃基单层薄膜作为多晶硅MEMS的抗粘涂层
4. Influence of InGaAs matrix thickness on the optical properties and strain distribution in self-assembled sub-monolayer InAs quantum dot heterostructures [C] . Saranya Reddy Shriram, Ravindra Kumar, Sanowar Alam Gazi, Nanophotonics Conference . 2020

机译：InGaAs基体厚度对自组装亚单层InAs量子点异质结构中光学性质和应变分布的影响
5. Functionalization of Organic Semiconductors and Other Carbon-based Materials by Self-Assembled Monolayers (SAMs) and Charge Transport in Organic Field-effect Transistors (OFETs) [D] . Lee, Bumsu 2012

机译：用自组装单层（SAMS）和其他碳基材料的官能化和其他碳基材料在有机场效应晶体管（OFETS）中的电荷输送
6. Enhancing Structural Properties and Performance ofGraphene-Based Devices Using Self-Assembled HMDS Monolayers [O] . Sami Ramadan, *, Yuanzhou Zhang, 2021

机译：提高结构性和性能使用自组装HMDS单层的基于石墨烯的器件
7. "SAMs meet MEMS": surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS [O] . Kim, B.J., Kim, G.M., Liebau, M., 2001

机译：“ SAMs满足MEMS”：使用自组装单层进行表面改性，用于光塑MEMS / NEMS的干法脱模

The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS

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